Publication | Open Access
Distortion-free measurement of electric field strength with a MEMS sensor
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Citations
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References
2017
Year
Electrical EngineeringMems SensorEngineeringMeasurementNano Electro Mechanical SystemMicroelectromechanical SystemsEducationInclinometerInstrumentationElectronic InstrumentationSensor TechnologyMicro-electromechanical System
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