An integrated, vertical-drive, in-plane-sense microgyroscope

Abstract

This paper describes the principle of operation and experimental results of a Y-axis /spl Sigma//spl Delta/ force-feedback gyroscope. The gyroscope was fabricated in Analog Devices' monolithic Modular-MEMS process with 6/spl mu/m thick structural polysilicon and 0.8/spl mu/m CMOS. The sensor utilizes vertical (Z-axis) actuation of the proof mass to enable in-plane (X-axis) differential sensing of the Coriolis force. Two orthogonally-oriented gyroscopes form a dual-axis rate sensor. The gyroscope achieves 8/spl deg//sec//spl radic/Hz noise floor, for operation at ambient pressure.