Axcelis Technologies (United States)

Axcelis Technologies (United States)

Statistics

Publications

389

Citations

5.6K

Authors

16

Location

Beverly, United States

Axcelis Technologies (United States) is a company institution in Beverly, United States known for materials science, materials engineering, and engineering.

Publications

389

Authors

16

  1. KS
    K. Saadatmand

    Axcelis Technologies (United States), United States

    82 publications · 344 citations

    11

    h-index

  2. OE
    Orlando Escorcia

    Axcelis Technologies (United States), United States

    22 publications · 242 citations

    8

    h-index

  3. MA
    M. Ameen

    Axcelis Technologies (United States), United States

    25 publications · 261 citations

    7

    h-index

  4. PL
    Peter L. Kellerman

    Axcelis Technologies (United States), United States

    33 publications · 168 citations

    7

    h-index

  5. MA
    Mike Ameen

    Axcelis Technologies (United States), United States

    15 publications · 252 citations

    5

    h-index

1–5 of 16