
Statistics
Publications
389
Citations
5.6K
Authors
16
Location
Beverly, United States
389
16
11
h-index
8
h-index
7
h-index
Axcelis Technologies (United States), United States
33 publications · 168 citations
7
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5
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1–5 of 16
Francesca Iacopi, Youssef Travaly, B. Eyckens et al. · Journal of Applied Physics · 2006 · 133 citations
Natural Sciences, Materials Engineering, Materials Science +12
P. Normand, E. Kapetanakis, Panagiotis Dimitrakis et al. · Applied Physics Letters · 2003 · 103 citations · Full text
1–5 of 389