Concepedia

Peter L. Kellerman

PL

6

Publications

113

Citations

6

H-Index

1999

Active since

Affiliations

Axcelis Technologies (United States)(Current)

Applied Materials (United States)

Clarkson University

Peter L. Kellerman is an author at Axcelis Technologies (United States) specializing in applied physics, engineering, and plasma diagnostics.

Top concepts

EngineeringApplied PhysicsPhysicsPlasma TheoryPlasma PhysicsMaterial ScienceMicroelectronicsPlasma DiagnosticsElectrical EngineeringMechanics

Publications per year

1999–2016

6

Publications

6

Measurements of secondary electron emission and plasma density enhancement for plasma exposed surfaces using an optically isolated Faraday cup

Shu Qin, Michael P. Bradley, Peter L. Kellerman et al. · Review of Scientific Instruments · 2002 · 24 citations

Engineering, Plasma Physics, Plasma Density Enhancement +17

PLASMA DOPING : PROGRESS AND POTENTIAL

Paul K. Chu, Susan B. Felch, Peter L. Kellerman et al. · Solid State Technology · 1999 · 23 citations

Engineering, Applied Physics, Plasma Physics +4

Ultrathin silicon oxynitride film formation by plasma immersion nitrogen implantation

I. J. R. Baumvol, C. Krug, F. C. Stedile et al. · Applied Physics Letters · 1999 · 18 citations

Engineering, Ultrathin Silicon, Medium Energy Ion +17

Experimental and numerical investigation of the horizontal ribbon growth process

Brian T. Helenbrook, Peter L. Kellerman, F. M. Carlson et al. · Journal of Crystal Growth · 2016 · 18 citations · Full text

Engineering, Mechanics, Mechanical Engineering +4

Floating Silicon Method single crystal ribbon – observations and proposed limit cycle theory

Peter L. Kellerman, Brian Kernan, Brian T. Helenbrook et al. · Journal of Crystal Growth · 2016 · 16 citations · Full text

Physics, Applied Physics, Limit Cycle Theory +3

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