6
Publications
188
Citations
6
H-Index
2000
Active since
Affiliations
Axcelis Technologies (United States)(Current)
Orlando Escorcia is an author at Axcelis Technologies (United States) specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsSurface ScienceElectrical EngineeringThin FilmsChemical EngineeringElectrical InsulationMaterials EngineeringPhysics
Publications per year
2000–2005
6
6
Plasma Impacts to an O-SiC Low-k Barrier Film
Wei Chen, Qingyuan Han, Robert Most et al. · Journal of The Electrochemical Society · 2004 · 16 citations
Materials Science, Electrical Engineering, Dielectric Constant +9
Rows per page
1–5 of 6