Statistics
Publications
1
Citations
16
H-Index
1
Active since
2004
Affiliations
Axcelis Technologies (United States)(Current)
Robert Most is an author at Axcelis Technologies (United States) specializing in dielectric constant, plasma surface treatment, and infrared spectra.
Publications per year
2004–2004
1
1
Plasma Impacts to an O-SiC Low-k Barrier Film
Wei Chen, Qingyuan Han, Robert Most et al. · Journal of The Electrochemical Society · 2004 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +17
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