Concepedia

Darren L. Moore

DL

4

Publications

100

Citations

4

H-Index

2005

Active since

Affiliations

University of Michigan(Current)

Darren L. Moore is an author at University of Michigan specializing in surface science, applied physics, and engineering.

Top concepts

Publications per year

2005–2005

4

Publications

4

Impact of reductive N2∕H2 plasma on porous low-dielectric constant SiCOH thin films

Hao Cui, Richard J. Carter, Darren L. Moore et al. · Journal of Applied Physics · 2005 · 38 citations · Full text

, , +15

Process integration compatibility of low-k and ultra-low-k dielectrics

Darren L. Moore, Richard Carter, Hao Cui et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2005 · 27 citations

, , +19

Damage of Low-k and Ultralow-k Dielectrics from Reductive Plasma Discharges Used for Photoresist Removal

Darren L. Moore, Richard J. Carter, Hao Cui et al. · Journal of The Electrochemical Society · 2005 · 23 citations

, , +18

Revealing hidden pore structure in nanoporous thin films using positronium annihilation lifetime spectroscopy

Huagen Peng, W. E. Frieze, Richard S. Vallery et al. · Applied Physics Letters · 2005 · 12 citations · Full text

, , +17

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