Concepedia

Substrate Inspection

Substrate Inspection is a systematic evaluation process within substrate preparation that involves the identification and analysis of surface characteristics and defects to ensure material suitability for subsequent processing or functional performance.

30

Publications

611

Citations

130

Authors

44

Institutions

Publications per year

2017–2026

6

Parents

Publications

30

Evaluation of the Reliability of Six Commercial SERS Substrates

Yu Liu, Yang Zhang, Morgan Tardivel et al. · Plasmonics · 2019 · 68 citations

, , +6

A golden-template self-generating method for patterned wafer inspection

Pin Xie, Sheng-Uei Guan · Machine Vision and Applications · 2000 · 41 citations

, , +14

Patterned wafer inspection by high resolution spectral estimation techniques

Babak Hossein Khalaj, Hamid K. Aghajan, T. Kailath · Machine Vision and Applications · 1994 · 40 citations

, , +14

Defect detection in patterned wafers using anisotropic kernels

Maria Zontak, Israel Cohen · Machine Vision and Applications · 2008 · 37 citations

, , +14

The discrimination of IgM and IgG type antibodies and Fab′ and F(ab)2 antibody fragments on an industrial substrate using scanning force microscopy

Clive J. Roberts, Martyn C. Davies, S. J. B. Tendler et al. · Ultramicroscopy · 1996 · 30 citations

, , +12

1–5 of 30

Authors

130

  1. AR
    Alan R. Stivers

    Intel (United States), United States

    3 publications · 45 citations

    3

    h-index

  2. TL
    Ted Liang

    Intel (United States), United States

    3 publications · 45 citations

    3

    h-index

  3. KR
    Kurt Ronse

    IMEC, Belgium

    2 publications · 32 citations

    2

    h-index

  4. TH
    Thorsten Hofmann

    Carl Zeiss (Germany), Germany

    2 publications · 32 citations

    2

    h-index

  5. DV
    Dieter Van den Heuvel

    IMEC, Belgium

    2 publications · 32 citations

    2

    h-index

1–5 of 130

Institutions

44

  1. Intel (United States)

    Santa Clara, United States

    6 h-index

    12 publications

    182 citations

  2. Lawrence Livermore National Laboratory

    Livermore, United States

    2 h-index

    5 publications

    58 citations

  3. IMEC

    Leuven, Belgium

    2 h-index

    8 publications

    128 citations

  4. National University of Singapore

    Singapore, Singapore

    2 h-index

    5 publications

    136 citations

  5. Carl Zeiss (Germany)

    Oberkochen, Germany

    2 h-index

    4 publications

    64 citations

  6. KLA (United States)

    Milpitas, United States

    2 h-index

    5 publications

    76 citations

  7. Stanford University

    Stanford, United States

    2 h-index

    10 publications

    260 citations

  8. National Institute of Advanced Industrial Science and Technology

    Tsukuba, Japan

    1 h-index

    3 publications

    33 citations

1–8 of 44

Venues

  1. 6

    h-index

  2. Machine Vision and Applications

    4 publications · 136 citations

    4

    h-index

  3. Fresenius Journal of Analytical Chemistry

    1 publications · 24 citations

    1

    h-index

  4. 1

    h-index

  5. Semiconductor Science and Technology

    1 publications · 20 citations

    1

    h-index

1–5