Patterned wafer inspection by high resolution spectral estimation techniques

ESPRIT-estimation of signal parameters via rotational invariance techniques

R. Roy, T. Kailath · IEEE Transactions on Acoustics Speech and Signal Processing · 1989 · 7.1K citations

Engineering, Electrical Engineering, Computational Acoustics +13

Maximum entropy spectral analysis

John P. Burg · Medical Entomology and Zoology · 1967 · 1.9K citations

Natural Sciences, Mathematics, Probability Theory +11

Estimation Of Signal Parameters Via Rotational Invariance Techniques- Esprit

A. Paulraj, R. Roy, T. Kailath · 1985 · 360 citations

Engineering, Geophysics, Time Series Analysis +5

A process for detecting defects in complicated patterns

Masakazu Ejiri, Takeshi Uno, Michihiro Mese et al. · Computer Graphics and Image Processing · 1973 · 116 citations

Computing, Computer Science, Feature Engineering +9

The P300: A system for automatic patterned wafer inspection

Byron Dom, Virginia H. Brecher, Raymond Bonner et al. · Machine Vision and Applications · 1988 · 39 citations

Engineering, Computer Engineering, Electrical Engineering +10