Concepedia

Substrate Etching

Substrate Etching is a chemical or physical process in microfabrication whereby material is selectively removed from a substrate surface to create predefined patterns or modify surface morphology, distinguishing it from other substrate preparation techniques by its precision and integration with lithographic processes.

154

Publications

6.2K

Citations

649

Authors

208

Institutions

Publications per year

2017–2026

12

Parents

Publications

154

Study of the SiO2-to-Si3N4 etch selectivity mechanism in inductively coupled fluorocarbon plasmas and a comparison with the SiO2-to-Si mechanism

M. Schaepkens, T. E. F. M. Standaert, N. R. Rueger et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 312 citations · Full text

, , +17

Self-ordered pore structure of anodized aluminum on silicon and pattern transfer

David T. Crouse, Yu‐Hwa Lo, A. E. Miller et al. · Applied Physics Letters · 2000 · 310 citations

, , +17

Pulsed plasma etching for semiconductor manufacturing

Demetre J. Economou · Journal of Physics D Applied Physics · 2014 · 212 citations

, , +17

Ordered Arrays of Vertically Aligned [110] Silicon Nanowires by Suppressing the Crystallographically Preferred <100> Etching Directions

Zhipeng Huang, Tomohiro Shimizu, Stephan Senz et al. · Nano Letters · 2009 · 182 citations

, , +16

Oxidation Rate Effect on the Direction of Metal-Assisted Chemical and Electrochemical Etching of Silicon

Zhipeng Huang, Tomohiro Shimizu, Stephan Senz et al. · The Journal of Physical Chemistry C · 2010 · 158 citations

, , +17

1–5 of 154

Authors

649

  1. JM
    J. M. E. Harper

    IBM Research - Thomas J. Watson Research Center, United States

    3 publications · 197 citations

    3

    h-index

  2. MT
    M. Taneya

    The University of Osaka, Japan

    3 publications · 54 citations

    3

    h-index

  3. TS
    Tomohiro Shimizu

    Kansai University, Japan

    3 publications · 351 citations

    3

    h-index

  4. JJ
    J. J. Cuomo

    IBM Research - Thomas J. Watson Research Center, United States

    3 publications · 197 citations

    3

    h-index

  5. SH
    Sang Heup Moon

    Seoul National University, South Korea

    3 publications · 59 citations

    3

    h-index

1–5 of 649

Institutions

208

  1. Hitachi (Japan)

    Tokyo, Japan

    6 h-index

    18 publications

    619 citations

  2. Chinese Academy of Sciences

    Beijing, China

    4 h-index

    19 publications

    1.9K citations

  3. Seoul National University

    Seoul, South Korea

    4 h-index

    16 publications

    371 citations

  4. The University of Osaka

    Osaka, Japan

    4 h-index

    17 publications

    331 citations

  5. NEC (Japan)

    Tokyo, Japan

    4 h-index

    9 publications

    286 citations

  6. NTT Basic Research Laboratories

    Atsugi, Japan

    3 h-index

    9 publications

    619 citations

  7. Lam Research (United States)

    Fremont, United States

    3 h-index

    4 publications

    453 citations

  8. IBM Research - Thomas J. Watson Research Center

    Yorktown Heights, United States

    3 h-index

    11 publications

    803 citations

1–8 of 208

Venues

  1. Applied Physics Letters

    17 publications · 1.1K citations

    15

    h-index

  2. Journal of The Electrochemical Society

    JES · 17 publications · 492 citations

    12

    h-index

  3. Japanese Journal of Applied Physics

    JJAP · 11 publications · 284 citations

    11

    h-index

  4. 10

    h-index

  5. Journal of Applied Physics

    7 publications · 169 citations

    7

    h-index

1–5