M. Taneya

Local vibrational modes as a probe of activation process in <i>p</i>-type GaN

Hisatomo Harima, Toshiaki Inoue, S. Nakashima et al. · Applied Physics Letters · 1999 · 64 citations

Materials Science, Semiconductor Technology, Wide-bandgap Semiconductor +13

Effect of Slight Misorientation of Sapphire Substrate on Metalorganic Chemical Vapor Deposition Growth of GaN

Takayuki Yuasa, Yoshihiro Ueta, Yuhzoh Tsuda et al. · Japanese Journal of Applied Physics · 1999 · 53 citations

Optical Materials, Engineering, Sapphire Substrate +16

Characterization of subsurface damage in GaAs processed by Ga+ focused ion-beam-assisted Cl2 etching using photoluminescence

M. Taneya, Yoshimasa Sugimoto, Kenzo Akita · Journal of Applied Physics · 1989 · 50 citations

Optical Materials, Ion-beam-assisted Cl2, Engineering +16

Novel electron-beam lithography for <i>i</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> patterning of GaAs using an oxidized surface thin layer as a resist

M. Taneya, Yoshimasa Sugimoto, H. Hidaka et al. · Journal of Applied Physics · 1990 · 48 citations

Engineering, Electron-beam Lithography, Optoelectronic Devices +19

Electron-Beam-Induced Cl₂ Etching of GaAs

M. Taneya, Yoshimasa Sugimoto, H. Hidaka et al. · Japanese Journal of Applied Physics · 1989 · 44 citations

Semiconductors, Electrical Engineering, Engineering +13