Concepedia

Sacrificial Layer Release

Sacrificial Layer Release is a micromachining fabrication technique in which a transient structural material layer is selectively etched away to enable the formation of free-standing microstructures, thereby distinguishing it from permanent structural or functional layers in the device.

47

Publications

1.7K

Citations

219

Authors

77

Institutions

Publications per year

2017–2026

7

Parents

Publications

47

Layered boron nitride as a release layer for mechanical transfer of GaN-based devices

Yasuyuki Kobayashi, Kazuhide Kumakura, Tetsuya Akasaka et al. · Nature · 2012 · 429 citations

, , +17

Sacrificial layer process with laser-driven release for batch assembly operations

Andrew S. Holmes, S.M. Saidam · Journal of Microelectromechanical Systems · 1998 · 82 citations

, , +17

Ultra-Small, High-Frequency and Substrate-Immune Microtube Inductors Transformed from 2D to 3D

Xin Yu, Wen Huang, Moyang Li et al. · Scientific Reports · 2015 · 74 citations · Full text

, , +17

Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware

Y. Fukuta, Hiroyuki Fujita, Hiroshi Toshiyoshi · Japanese Journal of Applied Physics · 2003 · 70 citations

, , +13

Robust hybrid elastomer/metal-oxide superhydrophobic surfaces

Sasha Hoshian, Ville Jokinen, Sami Franssila · Soft Matter · 2016 · 65 citations · Full text

, , +17

1–5 of 47

Authors

219

  1. YK
    Yasuyuki Kobayashi

    NTT Basic Research Laboratories, Japan

    2 publications · 481 citations

    2

    h-index

  2. TM
    Toshiki Makimōto

    NTT Basic Research Laboratories, Japan

    2 publications · 481 citations

    2

    h-index

  3. RC
    Rebecca Cheung

    University of Edinburgh, United Kingdom

    2 publications · 38 citations

    2

    h-index

  4. VJ
    Ville Jokinen

    Aalto University, Finland

    2 publications · 77 citations

    2

    h-index

  5. BK
    B.T. Khuri-Yakub

    Stanford University, United States

    2 publications · 32 citations

    2

    h-index

1–5 of 219

Institutions

77

  1. Stanford University

    Stanford, United States

    3 h-index

    23 publications

    627 citations

  2. National Chung Hsing University

    Taichung, Taiwan

    2 h-index

    5 publications

    106 citations

  3. NTT Basic Research Laboratories

    Atsugi, Japan

    2 h-index

    9 publications

    2K citations

  4. Seoul National University

    Seoul, South Korea

    2 h-index

    4 publications

    42 citations

  5. University of Illinois Urbana-Champaign

    Urbana, United States

    2 h-index

    9 publications

    494 citations

  6. University of Edinburgh

    Edinburgh, United Kingdom

    2 h-index

    11 publications

    207 citations

  7. National University of Singapore

    Singapore, Singapore

    2 h-index

    5 publications

    92 citations

  8. Aalto University

    Espoo, Finland

    2 h-index

    6 publications

    231 citations

1–8 of 77

Venues

  1. Journal of Micromechanics and Microengineering

    JMM · 5 publications · 85 citations

    5

    h-index

  2. IEEE Sensors Journal

    3 publications · 99 citations

    3

    h-index

  3. Journal of Microelectromechanical Systems

    3 publications · 175 citations

    3

    h-index

  4. ACS Nano

    2 publications · 54 citations

    2

    h-index

  5. 1

    h-index

1–5