Concepedia

Release Etching

Release Etching is a micromachining process in surface micromachining that selectively removes a sacrificial layer to free a suspended microstructure, thereby enabling its mechanical mobility within a MEMS device.

12

Publications

461

Citations

37

Authors

16

Institutions

Publications per year

2017–2026

0

Parents

Publications

12

The effect of release-etch processing on surface microstructure stiction

Robert L. Alley, G.J. Cuan, Roger T. Howe et al. · 2003 · 142 citations

, , +15

Free-standing SU-8 microfluidic chips by adhesive bonding and release etching

Santeri Tuomikoski, Sami Franssila · Sensors and Actuators A Physical · 2005 · 120 citations

, , +16

Silicon sacrificial layer dry etching (SSLDE) for free-standing RF MEMS architectures

S. Frederico, C. Hibert, R. Fritschi et al. · 2003 · 40 citations · Full text

, , +17

Effect of etch holes on quality factor of bulk-mode micromechanical resonators

Lichun Shao, Moorthi Palaniapan · Electronics Letters · 2008 · 35 citations

, , +17

Investigation of <i>in situ</i> trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems

Kitt Wai Kok, Won Jong Yoo, K. Sooriakumar et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 24 citations

, , +17

1–5 of 12

Authors

37

  1. DF
    Daniel Fernández

    Universitat Politècnica de Catalunya, Spain

    1 publications · 16 citations

    1

    h-index

  2. SF
    Sami Franssila

    Aalto University, Finland

    1 publications · 120 citations

    1

    h-index

  3. RL
    Robert L. Alley

    University of California, Berkeley, United States

    1 publications · 142 citations

    1

    h-index

  4. ST
    Santeri Tuomikoski

    University of Helsinki, Finland

    1 publications · 120 citations

    1

    h-index

  5. CH
    C. Hibert

    École Polytechnique Fédérale de Lausanne, Switzerland

    1 publications · 40 citations

    1

    h-index

1–5 of 37

Institutions

16

  1. National University of Singapore

    Singapore, Singapore

    2 h-index

    5 publications

    142 citations

  2. Agency for Science, Technology and Research

    Singapore, Singapore

    1 h-index

    3 publications

    36 citations

  3. Korea Electronics Technology Institute

    Seongnam-si, South Korea

    1 h-index

    2 publications

    34 citations

  4. École Polytechnique Fédérale de Lausanne

    Lausanne, Switzerland

    1 h-index

    6 publications

    240 citations

  5. University of California, Berkeley

    Berkeley, United States

    1 h-index

    4 publications

    568 citations

  6. Nanyang Technological University

    Singapore, Singapore

    1 h-index

    1 publications

    12 citations

  7. Sandia National Laboratories California

    Livermore, United States

    1 h-index

    3 publications

    39 citations

  8. Ascamm Technologic Center

    Cerdanyola del Vallès, Spain

    1 h-index

    1 publications

    16 citations

1–8 of 16

Venues

  1. Sensors and Actuators A Physical

    3 publications · 149 citations

    3

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 1 publications · 12 citations

    1

    h-index

  3. 1

    h-index

  4. Journal of Microelectromechanical Systems

    1 publications · 16 citations

    1

    h-index

  5. Small

    1 publications · 12 citations

    1

    h-index

1–5