Concepedia

K. Sooriakumar

KS

Statistics

Publications

3

Citations

65

H-Index

3

Active since

1991

Affiliations

Case Western Reserve University(Current)

K. Sooriakumar is an author at Case Western Reserve University specializing in materials science, thin films, and semiconductor device materials.

Publications per year

1991–2002

3

Publications

3

The preparation, characterization and application of plasma-enhanced chemically vapour deposited silicon nitride films deposited at low temperatures

Joseph Ya‐min Lee, K. Sooriakumar, Mandar M. Dange · Thin Solid Films · 1991 · 27 citations

Natural Sciences, Materials Engineering, Materials Science +14

Investigation of <i>in situ</i> trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems

Kitt Wai Kok, Won Jong Yoo, K. Sooriakumar et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 24 citations

Engineering, Materials Engineering, Materials Science +17

New applications of low temperature PECVD silicon nitride films for microelectronic device fabrication

M.D. Dange, J.Y. Lee, K. Sooriakumar · Microelectronics Journal · 1991 · 14 citations

Engineering, Electrical Engineering, Materials Science +17

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