Kitt Wai Kok

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Active since

2002

Affiliations

Agilent Technologies (United States)(Current)

Kitt Wai Kok is an author at Agilent Technologies (United States) specializing in microstructure control, microelectromechanical system fabrication, and mems fabrication.

Publications per year

2002–2002

Publications

Investigation of <i>in situ</i> trench etching process and Bosch process for fabricating high-aspect-ratio beams for microelectromechanical systems

Kitt Wai Kok, Won Jong Yoo, K. Sooriakumar et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2002 · 24 citations

Engineering, Materials Engineering, Materials Science +17

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