Concepedia

Pattern Transfer Efficiency

Pattern Transfer Efficiency is a metric that quantifies the fidelity and completeness with which a predefined pattern is accurately replicated from a source medium to a target substrate in nanofabrication and microfabrication processes.

16

Publications

707

Citations

83

Authors

28

Institutions

Publications per year

2017–2026

2

Parents

Publications

16

Huff-N-Puff Gas Injection Pilot Projects in the Eagle Ford

B. Todd Hoffman · 2018 · 150 citations

, , +13

New Insight into the Mechanism of Sequential Infiltration Synthesis from Infrared Spectroscopy

Mahua Biswas, Joseph A. Libera, Seth B. Darling et al. · Chemistry of Materials · 2014 · 131 citations

, , +15

Geometric and Material Determinants of Patterning Efficiency by Dielectrophoresis

Dirk R. Albrecht, Robert L. Sah, Sangeeta N. Bhatia · Biophysical Journal · 2004 · 80 citations · Full text

, , +14

Integration of block copolymer directed assembly with 193 immersion lithography

Chi‐Chun Liu, Paul F. Nealey, Alex K. Raub et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 62 citations

, , +14

Local mass transport and its effect on global pattern replication during hot embossing

H. Schulz, M. Wissen, Hella‐Christin Scheer · Microelectronic Engineering · 2003 · 52 citations

, , +14

1–5 of 16

Authors

83

  1. SN
    Sangeeta N. Bhatia

    Massachusetts Institute of Technology, United States

    1 publications · 80 citations

    1

    h-index

  2. SE
    Sebastian Engelmann

    IBM Research - Thomas J. Watson Research Center, United States

    1 publications · 19 citations

    1

    h-index

  3. HS
    Hella‐Christin Scheer

    University of Wuppertal, Germany

    1 publications · 52 citations

    1

    h-index

  4. CE
    Claire Elizabeth Troupe

    Heriot-Watt University, United Kingdom

    1 publications · 11 citations

    1

    h-index

  5. XL
    Xinchuan Liu

    The University of Texas at Arlington, United States

    1 publications · 15 citations

    1

    h-index

1–5 of 83

Institutions

28

  1. University of Chicago

    Chicago, United States

    2 h-index

    2 publications

    148 citations

  2. Samsung (United States)

    Ridgefield Park, United States

    1 h-index

    1 publications

    19 citations

  3. Montana Technological University

    Butte, United States

    1 h-index

    1 publications

    150 citations

  4. University of Southern California

    Los Angeles, United States

    1 h-index

    5 publications

    220 citations

  5. University of Wuppertal

    Wuppertal, Germany

    1 h-index

    3 publications

    156 citations

  6. University of California San Diego

    San Diego, United States

    1 h-index

    3 publications

    240 citations

  7. Deutsches Zentrum für Luft- und Raumfahrt e. V. (DLR)

    Cologne, Germany

    1 h-index

    3 publications

    102 citations

  8. Massachusetts Institute of Technology

    Cambridge, United States

    1 h-index

    1 publications

    24 citations

1–8 of 28

Venues

  1. Microelectronic Engineering

    5 publications · 149 citations

    5

    h-index

  2. Small

    1 publications · 15 citations

    1

    h-index

  3. Chemistry of Materials

    1 publications · 131 citations

    1

    h-index

  4. 1

    h-index

  5. Diamond and Related Materials

    1 publications · 11 citations

    1

    h-index

1–5