Alex K. Raub

Integration of block copolymer directed assembly with 193 immersion lithography

Chi‐Chun Liu, Paul F. Nealey, Alex K. Raub et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2010 · 62 citations

Integration Scheme, Engineering, Electron-beam Lithography +16

Lithographically Defined Porous Carbon Electrodes

David Bruce Burckel, Cody M. Washburn, Alex K. Raub et al. · Small · 2009 · 49 citations

Engineering, Nanoheterogeneous Catalysis, Chemistry +21

Fabrication of 22nm half-pitch silicon lines by single-exposure self-aligned spatial-frequency doubling

Alex K. Raub, Dong Li, A. Frauenglass et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2007 · 21 citations

Optical Materials, Engineering, Electron-beam Lithography +22

Imaging capabilities of resist in deep ultraviolet liquid immersion interferometric lithography

Alex K. Raub, A. Frauenglass, S. R. J. Brueck et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2004 · 20 citations

Engineering, Electron-beam Lithography, Microscopy +17

Deep-UV immersion interferometric lithography

Alex K. Raub, A. Frauenglass, S. R. J. Brueck et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 20 citations