Concepedia

Multi-layer Lithography

Multi-Layer Lithography is a thin film lithography technique that involves the sequential patterning and deposition of multiple functional layers on a substrate to create complex, vertically integrated micro- or nanoscale structures, distinguished from single-layer approaches by its ability to achieve three-dimensional device architectures through precise interlayer alignment and registration.

20

Publications

396

Citations

112

Authors

37

Institutions

Publications per year

2017–2026

1

Variants

Multilayer Lithography

Parents

Publications

20

Reflective multilayer optics for 6.7 nm wavelength radiation sources and next generation lithography

T. Tsarfati, Robbert Wilhelmus Elisabeth van de Kruijs, E. Zoethout et al. · Thin Solid Films · 2009 · 58 citations · Full text

, , +16

Embedded-mask-methods for mm-scale multi-layer vertical/slanted Si structures

Yoshio Mita, M. Mita, A. Tixier et al. · 2002 · 31 citations

, , +13

Multilayer three-dimensional photolithography with traditional planar method

Peng Yao, Garrett J. Schneider, Binglin Miao et al. · Applied Physics Letters · 2004 · 29 citations

, , +15

A nanoliter-scale open chemical reactor

Jean-Christophe Galas, Anne‐Marie Haghiri‐Gosnet, André Estevez‐Torres · Lab on a Chip · 2012 · 25 citations

, , +16

Classic, liquid, and matrix-assisted dip-pen nanolithography for materials research

Jian Zhong, Gang Sun, Dannong He · Nanoscale · 2014 · 25 citations

, , +14

1–5 of 20

Authors

112

  1. JG
    J.P. Gouy

    Laboratory for Integrated Micro-Mechatronic Systems, Japan

    1 publications · 31 citations

    1

    h-index

  2. DJ
    Daniel J. O’Brien

    The University of Texas MD Anderson Cancer Center, United States

    1 publications · 29 citations

    1

    h-index

  3. JZ
    Jian Zhong

    Shanghai Ocean University, China

    1 publications · 25 citations

    1

    h-index

  4. TF
    Timon Fliervoet

    ASML (Netherlands), Netherlands

    1 publications · 11 citations

    1

    h-index

  5. MM
    Martijn Maassen

    ASML (Netherlands), Netherlands

    1 publications · 19 citations

    1

    h-index

1–5 of 112

Institutions

37

  1. Centre National de la Recherche Scientifique

    Paris, France

    2 h-index

    4 publications

    86 citations

  2. ASML (Netherlands)

    Veldhoven, The Netherlands

    2 h-index

    18 publications

    326 citations

  3. University of Twente

    Enschede, The Netherlands

    1 h-index

    1 publications

    58 citations

  4. Saarland University

    Saarbrücken, Germany

    1 h-index

    2 publications

    28 citations

  5. Jinan Military General Hospital

    Jinan, China

    1 h-index

    1 publications

    25 citations

  6. Motorola (United States)

    Schaumburg, United States

    1 h-index

    3 publications

    36 citations

  7. Carnegie Mellon University

    Pittsburgh, United States

    1 h-index

    2 publications

    24 citations

  8. Shanghai Jiao Tong University

    Shanghai, China

    1 h-index

    1 publications

    25 citations

1–8 of 37

Venues

  1. 5

    h-index

  2. RSC Advances

    1 publications · 14 citations

    1

    h-index

  3. Optical Review

    1 publications · 11 citations

    1

    h-index

  4. Nanoscale

    1 publications · 25 citations

    1

    h-index

  5. 1

    h-index

1–5