Yoshio Mita

Advanced etching of silicon based on deep reactive ion etching for silicon high aspect ratio microstructures and three-dimensional micro- and nanostructures

Frédéric Marty, Lionel Rousseau, Bassam Saadany et al. · Microelectronics Journal · 2005 · 300 citations

Engineering, Materials Engineering, Materials Science +17

Design, Fabrication, and Control of MEMS-Based Actuator Arrays for Air-Flow Distributed Micromanipulation

Y. Fukuta, Y.A. Chapuis, Yoshio Mita et al. · Journal of Microelectromechanical Systems · 2006 · 90 citations

Engineering, Mechanical Engineering, Robotics Engineering +17

Free-Space Tunable and Drop Optical Filters Using Vertical Bragg Mirrors on Silicon

Bassam Saadany, Maurine Malak, Masanori Kubota et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2006 · 71 citations

Engineering, Electrical Engineering, Materials Science +17

A silicon shadow mask for deposition on isolated areas

Aude Tixier, Yoshio Mita, J.P. Gouy et al. · Journal of Micromechanics and Microengineering · 2000 · 48 citations

Engineering, Materials Engineering, Materials Science +17

A zero-power sensing MEMS shock sensor with a latch-reset mechanism for multi-threshold events monitoring

R Ranga Reddy, K Komeda, Yuki Okamoto et al. · Sensors and Actuators A Physical · 2019 · 48 citations · Full text

Engineering, Mechanical Engineering, Actuators +16