Concepedia

Masanori Kubota

MK

6

Publications

149

Citations

6

H-Index

2006

Active since

Affiliations

The University of Tokyo(Current)

UniLaSalle Amiens (ESIEE-Amiens)

Université Gustave Eiffel

University of Edinburgh

Masanori Kubota is an author at The University of Tokyo specializing in applied physics, engineering, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringInstrumentationMaterial ScienceMicrofabricationDielectricsSurface ScienceElectrochemistryMicroelectronics

Publications per year

2006–2017

6

Publications

6

Free-Space Tunable and Drop Optical Filters Using Vertical Bragg Mirrors on Silicon

Bassam Saadany, Maurine Malak, Masanori Kubota et al. · IEEE Journal of Selected Topics in Quantum Electronics · 2006 · 71 citations

Bosch Drie, Optical Materials, Engineering +19

Contour lithography methods for DRIE fabrication of nanometre–millimetre-scale coexisting microsystems

Yoshio Mita, Masanori Kubota, Tomoyuki Harada et al. · Journal of Micromechanics and Microengineering · 2006 · 26 citations

Large Area, Engineering, Electron-beam Lithography +23

Opportunities of CMOS-MEMS integration through LSI foundry and open facility

Yoshio Mita, Éric Lebrasseur, Yuki Okamoto et al. · Japanese Journal of Applied Physics · 2017 · 17 citations

Test Structure for Characterizing Low Voltage Coplanar EWOD System

Yifan Li, Yoshio Mita, Les I. Haworth et al. · IEEE Transactions on Semiconductor Manufacturing · 2009 · 14 citations

Dielectrics, Engineering, Electrode-electrolyte Interface +17

Silicon sub-micron-gap deep trench Pirani vacuum gauge for operation at atmospheric pressure

Masanori Kubota, Yoshio Mita, Masakazu Sugiyama · Journal of Micromechanics and Microengineering · 2011 · 11 citations

Electrical Engineering, Engineering, Micromachines +11

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