Martijn Maassen

Improving on-product performance at litho using integrated diffraction-based metrology and computationally designed device-like targets fit for advanced technologies (incl. FinFET)

Kai-Hsiung Chen, G. T. Huang, KS Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 21 citations

Engineering, Electrical Engineering, Materials Science +15

Holistic approach using accuracy of diffraction-based integrated metrology to improve on-product performance, reduce cycle time, and cost at litho

Kaustuve Bhattacharyya, Arie den Boef, Martin Jak et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 19 citations

Engineering, Electrical Engineering, Materials Science +17

Multi-beam Inspection (MBI) development progress and applications

Eric Long, Weiming Ren, Xinan Luo et al. · 2020 · 12 citations

Engineering, Electrical Engineering, Microelectronics +14

Multiple beam inspection (MBI) for 7nm node and beyond: technologies and applications

Eric Long, Kevin Chou, Martin Ebert et al. · 2019 · 10 citations

Engineering, Electrical Engineering, Manufacturing Engineering +14