2
Publications
25
Citations
2
H-Index
2019
Active since
Affiliations
Hermes Microvision (United States)(Current)
Xinan Luo is an author at Hermes Microvision (United States).
Publications per year
2019–2020
2
2
Multi-beam technology for defect inspection of wafer and mask
Weiming Ren, Xuedong Liu, Xuerang Hu et al. · 2019 · 13 citations
Multi-beam Inspection (MBI) development progress and applications
Eric Long, Weiming Ren, Xinan Luo et al. · 2020 · 12 citations
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