4
Publications
67
Citations
4
H-Index
2018
Active since
Affiliations
Hermes Microvision (United States)(Current)
Xuerang Hu is an author at Hermes Microvision (United States) specializing in instrumentation, industrial inspection, and edge computing.
Top concepts
MetrologyEngineeringEdge ComputingInstrumentationOptical MetrologySystems EngineeringComputer EngineeringComputer ArchitectureIndustrial Inspection
Publications per year
2018–2020
4
4
Multi-beam technology for defect inspection of wafer and mask
Weiming Ren, Xuedong Liu, Xuerang Hu et al. · 2019 · 13 citations
Multi-beam Inspection (MBI) development progress and applications
Eric Long, Weiming Ren, Xinan Luo et al. · 2020 · 12 citations
Multiple beam inspection (MBI) for 7nm node and beyond: technologies and applications
Eric Long, Kevin Chou, Martin Ebert et al. · 2019 · 10 citations
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