Machine-To-Tool Matching is a methodological framework that systematically aligns machine capabilities with specific tool functionalities to optimize task execution within automated systems.
4
Publications
89
Citations
29
Authors
12
Institutions
Publications per year
2017–2026
1
Parents
Publications
4
Use of multiple azimuthal angles to enable advanced scatterometry applications
Matthew Sendelbach, Alok Vaid, Pedro Herrera et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 19 citations
Natural Sciences, Materials Engineering, Materials Science +13
1–4 of 4
Authors
29
- SH
1
h-index
- PD
1
h-index
- TK
1
h-index
- JM
1
h-index
- TT
1
h-index
1–5 of 29
Institutions
12
Intel (United Kingdom)
Swindon, United Kingdom
1 h-index
3 publications
63 citations
KLA (United States)
Milpitas, United States
1 h-index
4 publications
76 citations
ASML (Netherlands)
Veldhoven, The Netherlands
1 h-index
5 publications
70 citations
GlobalFoundries (United States)
Santa Clara, United States
1 h-index
1 publications
19 citations
Imec the Netherlands
Eindhoven, Netherlands
1 h-index
5 publications
70 citations
Nikon (United States)
Melville, United States
1 h-index
5 publications
105 citations
IMEC
Leuven, Belgium
1 h-index
4 publications
56 citations
Nikon (Japan)
Tokyo, Japan
1 h-index
3 publications
63 citations
1–8 of 12
Venues
- Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
3 publications · 54 citations
3
h-index
- Robotics and Computer-Integrated Manufacturing
1 publications · 35 citations
1
h-index
1–2