Concepedia

Author

Shigeru Hirukawa

Nikon (Japan)

Also Known As

S. Hirukawa, Shigeru Hirukawa

24

Publications

205

Citations

7

H-Index

30

Concepts

All Affiliations

Nikon (Japan)Nikon (United States)
SH

About

Shigeru Hirukawa is an author at Nikon (Japan) specializing in engineering, optical materials, and optical properties.

Top Concepts

#ConceptH-IndexPublicationsCitations

1

Engineering

6

6

161

2

Applied Physics

3

3

57

3

Computer Engineering

2

2

98

4

Medicine

1

1

78

5

Biostatistics

1

1

21

Shigeru Hirukawa

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6

Publications

161

Citations

6

H-Index

YearCitations

New imaging technique for 64M-DRAM

Naomasa Shiraishi, Shigeru Hirukawa, Yuichiro Takeuchi,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

1992

78

Effects of laser bandwidth on OPE in a modern lithography tool

K. E. Huggins, Tsuyoshi Toki, Meng Tong Ong,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2006

21

Double patterning requirements for optical lithography and prospects for optical extension without double patterning

Andrew J. Hazelton, Shinji Wakamoto, Shigeru Hirukawa,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

2008

20

Full-field exposure tools for immersion lithography

Soichi Owa, Hiroyuki Nagasaka, Yuuki Ishii,

Optical Microlithography XVIII

2005

16

Development of polarized-light illuminator and its impact

Hisashi Nishinaga, Noriaki Tokuda, Soichi Owa,

Optical Microlithography XVIII

2005

14

<title>Automatic laser-scanning focus detection method using printed focus pattern</title>

Kyoichi Suwa, Hiroki Tateno, Nobuyuki Irie,

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE

1995

12

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