Concepedia

Andrew J. Hazelton

AJ

3

Publications

46

Citations

3

H-Index

1995

Active since

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

Andrew J. Hazelton is an author at Nikon (Japan) specializing in engineering, microelectronics, and computer engineering.

Top concepts

Engineering3D PrintingMicroelectronicsMicrofabricationComputer EngineeringLawDesignPhotonicsAutomationTechnology

Publications per year

1995–2008

3

Publications

3

Double patterning requirements for optical lithography and prospects for optical extension without double patterning

Andrew J. Hazelton, Shinji Wakamoto, Shigeru Hirukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 20 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Cost of ownership for future lithography technologies

Andrew J. Hazelton, Andrea Wüest, Greg Hughes et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 14 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

<title>Autonomous agent for on-machine acceptance of machined components</title>

Carmen M. Pancerella, Andrew J. Hazelton, H. Robert Frost · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 12 citations · Full text

Artificial Intelligence, Engineering, Industrial Engineering +22

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