Concepedia

Shinji Wakamoto

SW

4

Publications

91

Citations

4

H-Index

2007

Active since

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

Shinji Wakamoto is an author at Nikon (Japan) specializing in microelectronics, engineering, and computer engineering.

Top concepts

EngineeringMicroelectronics3D PrintingApplied PhysicsOptoelectronicsMicrofabricationComputer EngineeringPhotonicsOptical MaterialsOptical Properties

Publications per year

2007–2014

4

Publications

4

Double-patterning requirements for optical lithography and prospects for optical extension without double patterning

Shinji Wakamoto · Journal of Micro/Nanolithography MEMS and MOEMS · 2009 · 35 citations

Optical Materials, Engineering, Electron-beam Lithography +19

Double patterning requirements for optical lithography and prospects for optical extension without double patterning

Andrew J. Hazelton, Shinji Wakamoto, Shigeru Hirukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 20 citations

Optical Materials, Engineering, Electron-beam Lithography +18

Improved overlay control through automated high-order compensation

Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

Overlay Errors, Engineering, Wafer Scale Processing +14

Immersion lithography extension to sub-10nm nodes with multiple patterning

Soichi Owa, Shinji Wakamoto, Masayuki Murayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations

Electrical Engineering, Engineering, Electron-beam Lithography +14

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