Concepedia

Shinji Wakamoto

SW

Statistics

Publications

4

Citations

92

H-Index

4

Active since

2007

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

Shinji Wakamoto is an author at Nikon (Japan) specializing in semiconductor devices, engineering, and manufacturing engineering.

Publications per year

2007–2014

4

Publications

4

Double-patterning requirements for optical lithography and prospects for optical extension without double patterning

Shinji Wakamoto · Journal of Micro/Nanolithography MEMS and MOEMS · 2009 · 36 citations

Engineering, Manufacturing Engineering, Materials Science +15

Double patterning requirements for optical lithography and prospects for optical extension without double patterning

Andrew J. Hazelton, Shinji Wakamoto, Shigeru Hirukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 20 citations

Engineering, Electrical Engineering, Manufacturing Engineering +14

Improved overlay control through automated high-order compensation

Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

Engineering, Manufacturing Engineering, Computer-integrated Manufacturing +12

Immersion lithography extension to sub-10nm nodes with multiple patterning

Soichi Owa, Shinji Wakamoto, Masayuki Murayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations

Engineering, Electrical Engineering, Materials Engineering +15

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