Soichi Owa

Local structure and chemical valency of Mn impurities in wide-band-gap III–V magnetic alloy semiconductors Ga1−xMnxN

Y. L. Soo, S. Kim, S. Huang et al. · Applied Physics Letters · 2001 · 98 citations

Wide-bandgap Semiconductor, Magnetic Properties, Local Structure +20

Immersion lithography; its potential performance and issues

Soichi Owa, Hiroyuki Nagasaka · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 61 citations

Advantage and feasibility of immersion lithography

Soichi Owa · Journal of Micro/Nanolithography MEMS and MOEMS · 2004 · 54 citations

Engineering, Electron-beam Lithography, Ophthalmology +15

Protein Crystal Processing Using a Deep-UV Laser

Hiroshi Kitano, Hiroaki Adachi, Atsutoshi Murakami et al. · Japanese Journal of Applied Physics · 2003 · 22 citations

X-ray Crystallography, Engineering, Protein Folding +15

Immersion lithography: its history, current status and future prospects

Soichi Owa, Hiroyuki Nagasaka · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 19 citations