Concepedia

Soichi Owa

SO

18

Publications

437

Citations

14

H-Index

1992

Active since

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

The University of Osaka

Tokyo Electron (Japan)

Soichi Owa is an author at Nikon (Japan) specializing in engineering, applied physics, and microfabrication.

Top concepts

EngineeringApplied PhysicsMicrofabricationElectronic PackagingOptoelectronicsMicroelectronicsMedicineOptical Properties3D PrintingOphthalmology

Publications per year

1992–2014

18

Publications

18

Local structure and chemical valency of Mn impurities in wide-band-gap III–V magnetic alloy semiconductors Ga1−xMnxN

Y. L. Soo, S. Kim, S. Huang et al. · Applied Physics Letters · 2001 · 98 citations

Wide-bandgap Semiconductor, Magnetic Properties, Local Structure +20

Immersion lithography; its potential performance and issues

Soichi Owa, Hiroyuki Nagasaka · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 61 citations

Advantage and feasibility of immersion lithography

Soichi Owa · Journal of Micro/Nanolithography MEMS and MOEMS · 2004 · 54 citations

Engineering, Electron-beam Lithography, Ophthalmology +15

Protein Crystal Processing Using a Deep-UV Laser

Hiroshi Kitano, Hiroaki Adachi, Atsutoshi Murakami et al. · Japanese Journal of Applied Physics · 2003 · 22 citations

X-ray Crystallography, Engineering, Protein Folding +15

Immersion lithography: its history, current status and future prospects

Soichi Owa, Hiroyuki Nagasaka · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 19 citations

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