Hiroyuki Nagasaka - Concepedia

Author

Hiroyuki Nagasaka

Also Known As

Hiroyuki Nagasaka

Publications

191

Citations

H-Index

Concepts

All Affiliations

Hiroyuki Nagasaka is an author at Nikon (Japan) specializing in electronic packaging, optical engineering, and applied physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	3	3	48
2	Applied Physics	3	3	48
3	Medicine	1	1	15
4	Natural Sciences	1	1	38
5	Chemistry	1	1	38

Hiroyuki Nagasaka

Publications

166

Citations

H-Index

Page 1

	Year	Citations
Immersion lithography; its potential performance and issues Soichi Owa, Hiroyuki Nagasaka Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2003	61
Fourier transform millimeter-wave spectroscopy of chlorocarbene (HCCl) Satoshi Yamamoto, Hideta Habara, Eunsook Kim, The Journal of Chemical Physics Microwave SpectroscopyMolecular SpectroscopyPhysicsChlorine AtomSpectroscopy	2001	38
Immersion lithography: its history, current status and future prospects Soichi Owa, Hiroyuki Nagasaka Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE	2008	19
Current status and future prospect of immersion lithography Soichi Owa, Hiroyuki Nagasaka, Katsushi Nakano, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Optical EngineeringManufacturing PhaseEngineeringElectron-beam LithographyImmersion Lithography	2006	17
Full-field exposure tools for immersion lithography Soichi Owa, Hiroyuki Nagasaka, Yuuki Ishii, Optical Microlithography XVIII Optical EngineeringLight Field ImagingOptical MaterialsEngineeringElectron-beam Lithography	2005	16
Feasibility of immersion lithography Soichi Owa, Hiroyuki Nagasaka, Yuuki Ishii, Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE Immersion Exposure ToolsEngineeringElectron-beam LithographyOphthalmologyMicroscopy	2004	15

Page 1