Concepedia

Hiroyuki Nagasaka

HN

6

Publications

166

Citations

6

H-Index

2001

Active since

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

Hiroyuki Nagasaka is an author at Nikon (Japan) specializing in electronic packaging, optical engineering, and applied physics.

Top concepts

Publications per year

2001–2008

6

Publications

6

Immersion lithography; its potential performance and issues

Soichi Owa, Hiroyuki Nagasaka · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 61 citations

Fourier transform millimeter-wave spectroscopy of chlorocarbene (HCCl)

Satoshi Yamamoto, Hideta Habara, Eunsook Kim et al. · The Journal of Chemical Physics · 2001 · 38 citations

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Immersion lithography: its history, current status and future prospects

Soichi Owa, Hiroyuki Nagasaka · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 19 citations

Current status and future prospect of immersion lithography

Soichi Owa, Hiroyuki Nagasaka, Katsushi Nakano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

, , +10

Full-field exposure tools for immersion lithography

Soichi Owa, Hiroyuki Nagasaka, Yuuki Ishii et al. · Optical Microlithography XVIII · 2005 · 16 citations

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