Concepedia

Katsushi Nakano

KN

4

Publications

109

Citations

4

H-Index

1997

Active since

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

Katsushi Nakano is an author at Nikon (Japan) specializing in applied physics, engineering, and medicine.

Top concepts

EngineeringApplied PhysicsMedicineBiophysicsMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingMaterial CharacterizationMicroscopy

Publications per year

1997–2006

4

Publications

4

Scanning Force Microscopy of the Interaction Events between a Single Molecule of Heavy Meromyosin and Actin

Hideo Nakajima, Y. Kunioka, Katsushi Nakano et al. · Biochemical and Biophysical Research Communications · 1997 · 69 citations

Single Molecule Biophysics, Biochemistry, Protein Folding +11

Current status and future prospect of immersion lithography

Soichi Owa, Hiroyuki Nagasaka, Katsushi Nakano et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 17 citations

Optical Engineering, Manufacturing Phase, Engineering +10

A novel low profile atomic force microscope compatible with optical microscopes

Katsushi Nakano · Review of Scientific Instruments · 1998 · 12 citations

Engineering, Microscopy, Mechanical Engineering +20

Defect studies of resist process for 193nm immersion lithography

Tomoyuki Ando, Katsumi Ohmori, Satoshi Maemori et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

Engineering, Electron-beam Lithography, Beam Lithography +16

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