Concepedia

Katsumi Ohmori

KO

Statistics

Publications

10

Citations

188

H-Index

10

Active since

2000

Affiliations

Tokyo Ohka Kogyo (Japan)(Current)

The University of Osaka

Tokyo Institute of Technology

Katsumi Ohmori is an author at Tokyo Ohka Kogyo (Japan) specializing in engineering, materials science, and applied physics.

Top concepts

Publications per year

2000–2016

10

Publications

10

Perpendicularly oriented sub-10-nm block copolymer lamellae by atmospheric thermal annealing for one minute

Takehiro Seshimo, Rina Maeda, Rin Odashima et al. · Scientific Reports · 2016 · 54 citations · Full text

Patterning performance of chemically amplified resist in EUV lithography

Tatsuya Fujii, Shogo Matsumaru, Tomotaka Yamada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 25 citations

, , +17

Perpendicular orientation control in thin films of POSS-containing block copolymer domains with a top-coat surface treatment

Takehiro Seshimo, Yoshiyuki Utsumi, Takahiro Dazai et al. · Polymer Journal · 2016 · 18 citations · Full text

, , +10

EUV Resist Chemical Analysis by Soft X-ray Absorption Spectroscopy for High Sensitivity Achievement

Kazuya Emura, Takeo Watanabe, Masato Yamaguchi et al. · Journal of Photopolymer Science and Technology · 2014 · 17 citations · Full text

, , +21

Effect of Acid Diffusion and Polymer Structure on Line Edge Roughness

Hiroki Yamamoto, Takahiro Kozawa, Akinori Saeki et al. · Japanese Journal of Applied Physics · 2007 · 16 citations

, , +19

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