Concepedia

Kazuya Emura

KE

Statistics

Publications

2

Citations

29

H-Index

2

Active since

2012

Affiliations

University of Hyogo(Current)

Kazuya Emura is an author at University of Hyogo specializing in natural sciences, materials science, and engineering.

Top concepts

Publications per year

2012–2014

2

Publications

2

EUV Resist Chemical Analysis by Soft X-ray Absorption Spectroscopy for High Sensitivity Achievement

Kazuya Emura, Takeo Watanabe, Masato Yamaguchi et al. · Journal of Photopolymer Science and Technology · 2014 · 17 citations · Full text

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Chemical Reaction Analysis of EUV CA Resist using SR Absorption Spectroscopy

Takeo Watanabe, Yuichi Haruyama, Daiju Shiono et al. · Journal of Photopolymer Science and Technology · 2012 · 12 citations · Full text

, , +18

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