Concepedia

Satoshi Maemori

SM

1

Publications

11

Citations

1

H-Index

2006

Active since

Affiliations

Nikon (Japan)(Current)

Satoshi Maemori is an author at Nikon (Japan) specializing in electronic packaging, applied physics, and microfabrication.

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Publications per year

2006–2006

1

Publications

1

Defect studies of resist process for 193nm immersion lithography

Tomoyuki Ando, Katsumi Ohmori, Satoshi Maemori et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 11 citations

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