Concepedia

Koji Yasukawa

KY

1

Publications

19

Citations

1

H-Index

2007

Active since

Affiliations

KLA (United States)(Current)

Koji Yasukawa is an author at KLA (United States) specializing in vibration control, systems engineering, and technology.

Top concepts

TechnologyEngineeringControl DesignMicroelectronicsVibration ControlMechanical SystemsControl EngineeringSystems EngineeringComputer EngineeringElectronic Packaging

Publications per year

2007–2007

1

Publications

1

Improved overlay control through automated high-order compensation

Shinji Wakamoto, Y. Ishii, Koji Yasukawa et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 19 citations

Overlay Errors, Engineering, Wafer Scale Processing +14

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