Masayuki Murayama is an author at Nikon (Japan) specializing in electronic packaging, 3d printing, and applied physics.
Top concepts
3D PrintingEngineeringApplied PhysicsOptoelectronicsMicroelectronicsMicrofabricationElectronic PackagingElectrical Engineering
Publications per year
2014–2014
1
1
Immersion lithography extension to sub-10nm nodes with multiple patterning
Soichi Owa, Shinji Wakamoto, Masayuki Murayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 17 citations
Electrical Engineering, Engineering, Electron-beam Lithography +14
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