Concepedia

Greg Hughes

GH

4

Publications

58

Citations

4

H-Index

1992

Active since

Affiliations

Photometrics (United States)(Current)

DuPont (United States)

Greg Hughes is an author at Photometrics (United States) specializing in engineering, optical properties, and applied physics.

Top concepts

EngineeringApplied PhysicsOptoelectronicsMaterial ScienceMicrofabricationOptical PropertiesLawChemistryPhotonicsTechnology

Publications per year

1992–2008

4

Publications

4

Attenuated phase-shifting photomasks fabricated from Cr-based embedded shifter blanks

Franklin D. Kalk, Roger H. French, H. Ufuk Alpay et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 19 citations

Engineering, Phase-shifting Photomasks, Optic Design +16

<title>Issues associated with the commercialization of phase-shift masks</title>

John L. Nistler, Greg Hughes, A. Muray et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1992 · 14 citations

Mask Inspection, Visual Communication, Phase-shift Masks +4

Cost of ownership for future lithography technologies

Andrew J. Hazelton, Andrea Wüest, Greg Hughes et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 14 citations

Electrical Engineering, Wafer Scale Processing, Engineering +15

Binary halftone chromeless PSM technology for λ/4;optical lithography

J. Fung Chen, John S. Petersen, Robert Socha et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 11 citations

Optical Materials, Engineering, Electron-beam Lithography +18

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