Franklin D. Kalk

Optical analysis of complex multilayer structures using multiple data types

Blaine Johs, Roger H. French, Franklin D. Kalk et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 47 citations

Optical Materials, Engineering, Microscopy +21

Stability of Te–Cu amorphous alloy thin films for optical recording

P. F. Carcia, Franklin D. Kalk, P. E. Bierstedt et al. · Journal of Applied Physics · 1988 · 27 citations

Optical Materials, Engineering, Thin Film Process Technology +19

Attenuated phase-shifting photomasks fabricated from Cr-based embedded shifter blanks

Franklin D. Kalk, Roger H. French, H. Ufuk Alpay et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 19 citations

Engineering, Phase-shifting Photomasks, Optic Design +16

Oxygen plasma etching of thick polymer layers

Irving S. Goldstein, Franklin D. Kalk · Journal of Vacuum Science and Technology · 1981 · 15 citations

Materials Science, Chemical Engineering, Engineering +12

The impact of 14-nm photomask uncertainties on computational lithography solutions

John L. Sturtevant, Edita Tejnil, Tim Lin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 15 citations

Engineering, Electron-beam Lithography, Optical Testing +19