Advanced Mask Technology Center (Germany)

Statistics

Publications

289

Citations

2.4K

Authors

Location

Dresden, Germany

Also known as AMTC

Advanced Mask Technology Center (Germany) is a company institution in Dresden, Germany known for engineering, materials science, and mask fabrication.

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Top concepts

EngineeringMask FabricationMaterials ScienceMask DesignMaterials EngineeringMask MetrologyOpticsNatural SciencesImmersion LithographyManufacturing Engineering

Publications

289

Accurate ARL Calculation for EWMA Control Charts Monitoring Normal Mean and Variance Simultaneously

Sven Knoth · Sequential Analysis · 2007 · 45 citations

Computing, Systems Engineering, Instrumentation +12

Computation of the ARL for CUSUM- schemes

Sven Knoth · Computational Statistics & Data Analysis · 2005 · 37 citations

Computing, Computer Engineering, Computer Science +3

Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks

Aamod Shanker, Lei Tian, Martin Sczyrba et al. · Applied Optics · 2014 · 28 citations · Full text

Natural Sciences, Biomedical Engineering, Biomedical Imaging +13

Deep ultraviolet scatterometer for dimensional characterization of nanostructures: system improvements and test measurements

Matthias Wurm, Stefanie Bonifer, Bernd Bodermann et al. · Measurement Science and Technology · 2011 · 25 citations

Natural Sciences, Materials Science, Physics +17

Experimental approach to EUV imaging enhancement by mask absorber height optimization

Natalia Davydova, Robert de Kruif, Haiko Rolff et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +16

1–5 of 289

Authors

WP
Werner Pietsch
Advanced Mask Technology Center (Germany), Germany
18 publications · 252 citations
9
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WH
W. H. Broadbent
Advanced Mask Technology Center (Germany), Germany
116 publications · 340 citations
8
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PB
Peter Buck
Advanced Mask Technology Center (Germany), Germany
93 publications · 355 citations
8
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KB
Karsten Bubke
Advanced Mask Technology Center (Germany), Germany
38 publications · 257 citations
7
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FD
Franklin D. Kalk
Advanced Mask Technology Center (Germany), Germany
45 publications · 211 citations
7
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1–5 of 35