Concepedia
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Publications
287
Citations
2.3K
Authors
36
Location
Dresden, Germany
Also known as AMTC
Advanced Mask Technology Center (Germany) is a company institution in Dresden, Germany known for engineering, applied physics, and optical properties.
Top concepts
EngineeringApplied PhysicsOptical PropertiesMicroscopyInstrumentationMicroelectronicsOptoelectronicsMaterial ScienceCalibrationOphthalmology
Accurate ARL Calculation for EWMA Control Charts Monitoring Normal Mean and Variance Simultaneously
Sven Knoth · Sequential Analysis · 2007 · 45 citations
Engineering, Aerospace Engineering, Calibration +12
Computation of the ARL for CUSUM- schemes
Sven Knoth · Computational Statistics & Data Analysis · 2005 · 36 citations
Numerical Analysis, Engineering, Computational Number Theory +4
Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks
Aamod Shanker, Lei Tian, Martin Sczyrba et al. · Applied Optics · 2014 · 28 citations · Full text
Engineering, Microscopy, Intensity Phase Imaging +18
Deep ultraviolet scatterometer for dimensional characterization of nanostructures: system improvements and test measurements
Matthias Wurm, Stefanie Bonifer, Bernd Bodermann et al. · Measurement Science and Technology · 2011 · 25 citations
System Improvements, Engineering, Microscopy +22
Experimental approach to EUV imaging enhancement by mask absorber height optimization
Natalia Davydova, Robert de Kruif, Haiko Rolff et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations
Image Reconstruction, Optical Materials, Engineering +23
1–5 of 287
Advanced Mask Technology Center (Germany), Germany
18 publications · 251 citations
9
h-index
116 publications · 339 citations
8
93 publications · 344 citations
39 publications · 266 citations
7
44 publications · 209 citations
1–5 of 36