Concepedia

Matthias Wurm

MW

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Publications

2

Citations

39

H-Index

2

Active since

2011

Affiliations

Physikalisch-Technische Bundesanstalt(Current)

Matthias Wurm is an author at Physikalisch-Technische Bundesanstalt specializing in calibration, natural sciences, and synchrotron radiation.

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Publications per year

2011–2021

2

Publications

2

Deep ultraviolet scatterometer for dimensional characterization of nanostructures: system improvements and test measurements

Matthias Wurm, Stefanie Bonifer, Bernd Bodermann et al. · Measurement Science and Technology · 2011 · 25 citations

, , +22

A universal and fast method to solve linear systems with correlated coefficients using weighted total least squares

Matthias Wurm · Measurement Science and Technology · 2021 · 14 citations · Full text

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