Concepedia

Martin Sczyrba

MS

Statistics

Publications

3

Citations

49

H-Index

3

Active since

2007

Affiliations

Advanced Mask Technology Center (Germany)(Current)

University of California, Berkeley

Martin Sczyrba is an author at Advanced Mask Technology Center (Germany) specializing in engineering, medicine, and optical properties.

Top concepts

Publications per year

2007–2014

3

Publications

3

Transport of intensity phase imaging in the presence of curl effects induced by strongly absorbing photomasks

Aamod Shanker, Lei Tian, Martin Sczyrba et al. · Applied Optics · 2014 · 28 citations · Full text

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Performance comparison of techniques for intra-field CD control improvement

Rainer Pforr, Mario Hennig, Jens Reichelt et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

, , +14

Critical assessment of the transport of intensity equation as a phase recovery technique in optical lithography

Aamod Shanker, Martin Sczyrba, Bríd Connolly et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 10 citations

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