Concepedia

Mario Hennig

MH

Statistics

Publications

1

Citations

11

H-Index

1

Active since

2007

Affiliations

Advanced Mask Technology Center (Germany)(Current)

Mario Hennig is an author at Advanced Mask Technology Center (Germany) specializing in instrumentation, computer engineering, and process control.

Top concepts

Publications per year

2007–2007

1

Publications

1

Performance comparison of techniques for intra-field CD control improvement

Rainer Pforr, Mario Hennig, Jens Reichelt et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2007 · 11 citations

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