Statistics
Publications
1
Citations
23
H-Index
1
Active since
2013
Affiliations
Haiko Rolff is an author at Advanced Mask Technology Center (Germany) specializing in mask design, thin film lithography, and soft lithography.
Publications per year
2013–2013
1
1
Experimental approach to EUV imaging enhancement by mask absorber height optimization
Natalia Davydova, Robert de Kruif, Haiko Rolff et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +16
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