Robert de Kruif

Progress on EUV pellicle development

Carmen Zoldesi, K. Bal, Brian Blum et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 85 citations

Natural Sciences, Manufacturing Engineering, Materials Science +10

High-power EUV lithography: spectral purity and imaging performance

Mark van de Kerkhof, Fei Liu, Marieke Meeuwissen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2020 · 36 citations · Full text

Engineering, Manufacturing Engineering, Materials Engineering +13

Experimental approach to EUV imaging enhancement by mask absorber height optimization

Natalia Davydova, Robert de Kruif, Haiko Rolff et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations

Natural Sciences, Materials Engineering, Materials Science +16

Impact of an etched EUV mask black border on imaging and overlay

Natalia Davydova, Robert de Kruif, Norihito Fukugami et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 16 citations

Engineering, Optometry, Digital Imaging +15

Mask aspects of EUVL imaging at 27nm node and below

Natalia Davydova, Eelco van Setten, Sang-In Han et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 16 citations

Engineering, Materials Engineering, Materials Science +12