Statistics
Publications
6
Citations
114
H-Index
6
Active since
1999
Affiliations
Toppan (Japan)(Current)
Norihito Fukugami is an author at Toppan (Japan) specializing in materials science, materials engineering, and mask fabrication.
Publications per year
1999–2013
6
6
Imprinted optical pattern of low-softening phosphate glass
Hiromichi Takebe, Makoto Kuwabara, Masaharu KOMORI et al. · Optics Letters · 2007 · 38 citations
Natural Sciences, Materials Engineering, Materials Science +12
Experimental approach to EUV imaging enhancement by mask absorber height optimization
Natalia Davydova, Robert de Kruif, Haiko Rolff et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 23 citations
Natural Sciences, Materials Engineering, Materials Science +16
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