Concepedia

Fei Liu

FL

Statistics

Publications

4

Citations

97

H-Index

4

Active since

2019

Affiliations

University of Twente(Current)

ASML (Netherlands)

Fei Liu is an author at University of Twente specializing in applied physics, optoelectronics, and engineering.

ORCID

Top concepts

Publications per year

2019–2025

4

Publications

4

High-power EUV lithography: spectral purity and imaging performance

Mark van de Kerkhof, Fei Liu, Marieke Meeuwissen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2020 · 34 citations · Full text

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Spectral characterization of an industrial EUV light source for nanolithography

Francesco Torretti, Fei Liu, Muharrem Bayraktar et al. · Journal of Physics D Applied Physics · 2019 · 27 citations · Full text

, , +22

Scalable Fabrication of Uniform Fast‐Response Humidity Field Sensing Array for Respiration Recognition and Contactless Human‐Machine Interaction

Zhicheng Zhang, Jianye Li, Huizhi Chen et al. · Advanced Functional Materials · 2025 · 26 citations · Full text

Spectral purity performance of high-power EUV systems

Mark van de Kerkhof, Fei Liu, Marieke Meeuwissen et al. · 2020 · 10 citations · Full text

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