Concepedia

Fei Liu

FL

Statistics

Publications

4

Citations

113

H-Index

4

Active since

2019

Affiliations

University of Twente(Current)

ASML (Netherlands)

Fei Liu is an author at University of Twente specializing in euv emission, photonics, and materials science.

Publications per year

2019–2025

4

Publications

4

Scalable Fabrication of Uniform Fast‐Response Humidity Field Sensing Array for Respiration Recognition and Contactless Human‐Machine Interaction

Zhicheng Zhang, Jianye Li, Huizhi Chen et al. · Advanced Functional Materials · 2025 · 39 citations · Full text

Engineering, Bioengineering, Biomedical Engineering +17

High-power EUV lithography: spectral purity and imaging performance

Mark van de Kerkhof, Fei Liu, Marieke Meeuwissen et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2020 · 36 citations · Full text

Engineering, Manufacturing Engineering, Materials Engineering +13

Spectral characterization of an industrial EUV light source for nanolithography

Francesco Torretti, Fei Liu, Muharrem Bayraktar et al. · Journal of Physics D Applied Physics · 2019 · 28 citations · Full text

Natural Sciences, Materials Science, Physics +17

Spectral purity performance of high-power EUV systems

Mark van de Kerkhof, Fei Liu, Marieke Meeuwissen et al. · 2020 · 10 citations · Full text

Veterinary Medicine, Biomedical Engineering, Biomedical Imaging +15

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