A. Muray

Development of a 500 Å spatial resolution light microscope

A. Lewis, M. Isaacson, A. Harootunian et al. · Ultramicroscopy · 1984 · 734 citations

Fluorescence Microscopy, High Resolution, Engineering +7

<i>I</i> <i>n</i> <i>s</i> <i>i</i> <i>t</i> <i>u</i> vaporization of very low molecular weight resists using 1/2 nm diameter electron beams

M. Isaacson, A. Muray · Journal of Vacuum Science and Technology · 1981 · 111 citations

Electrical Engineering, Contrast Curves, Engineering +14

Radiolysis and resolution limits of inorganic halide resists

A. Muray, M. R. Scheinfein, M. Isaacson et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1985 · 107 citations

Engineering, Electron-beam Lithography, Chemistry +18

AlF3—A new very high resolution electron beam resist

A. Muray, M. Isaacson, I. Adesida · Applied Physics Letters · 1984 · 80 citations

Ion Implantation, Engineering, Electron-beam Lithography +10

Electron energy loss spectroscopy across a metal-insulator interface at sub-nanometer spatial resolution

M. R. Scheinfein, A. Muray, M. Isaacson · Ultramicroscopy · 1985 · 47 citations

Sub-nanometer Spatial Resolution, Engineering, Physics +8