Concepedia

J. Fung Chen

JF

1

Publications

11

Citations

1

H-Index

2001

Active since

Affiliations

Photometrics (United States)(Current)

J. Fung Chen is an author at Photometrics (United States) specializing in optical systems, optical properties, and organic photonics.

Top concepts

EngineeringNanophotonicsApplied PhysicsOptical SystemsOptoelectronicsMaterial ScienceMicrofabricationOptical MaterialsOrganic PhotonicsOptical Properties

Publications per year

2001–2001

1

Publications

1

Binary halftone chromeless PSM technology for λ/4;optical lithography

J. Fung Chen, John S. Petersen, Robert Socha et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2001 · 11 citations

Optical Materials, Engineering, Electron-beam Lithography +18

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