Statistics
Publications
2
Citations
36
H-Index
2
Active since
2005
Affiliations
Nikon (United States)(Current)
Takehito Kudo is an author at Nikon (United States) specializing in optics, phase shift masks, and laser physics.
Publications per year
2005–2006
2
2
Development of polarized-light illuminator and its impact
Hisashi Nishinaga, Noriaki Tokuda, Soichi Owa et al. · Optical Microlithography XVIII · 2005 · 15 citations
1–2 of 2