Concepedia

Hisashi Nishinaga

HN

Statistics

Publications

3

Citations

50

H-Index

3

Active since

2005

Affiliations

Nikon (Japan)(Current)

Nikon (United States)

Hisashi Nishinaga is an author at Nikon (Japan) specializing in engineering, optical materials, and optical properties.

Top concepts

Publications per year

2005–2011

3

Publications

3

An aberration control of projection optics for multi-patterning lithography

Yasuhiro Ohmura, Taro Ogata, Toru Hirayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 18 citations

, , +15

Thermal aberration control in projection lens

Toshiharu Nakashima, Yasuhiro Ohmura, Taro Ogata et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 18 citations

, , +18

Development of polarized-light illuminator and its impact

Hisashi Nishinaga, Noriaki Tokuda, Soichi Owa et al. · Optical Microlithography XVIII · 2005 · 14 citations

, , +14

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