Statistics
Publications
4
Citations
74
H-Index
4
Active since
2008
Affiliations
Nikon (Japan)(Current)
Toshiharu Nakashima is an author at Nikon (Japan) specializing in engineering, optical tolerancing, and ophthalmology.
Publications per year
2008–2022
4
4
High-order aberration control during exposure for leading-edge lithography projection optics
Yasuhiro Ohmura, Yosuke Tsuge, Toru Hirayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 14 citations
Optical Materials, Engineering, Electron-beam Lithography +20
Tomoyuki Matsuyama, Naonori Kita, Toshiharu Nakashima et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2010 · 12 citations
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